The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. ex. Some numerals are expressed as "XNUMX".
Copyrights notice
The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. Copyrights notice
Dans cet article, les modes parasites et le facteur de qualité (Q) les valeurs des résonateurs à onde d'agneau AlN bimode à un port à 500-1000 4 MHz ont été étudiées par analyse théorique et vérification expérimentale. Grâce à l'analyse par éléments finis, nous avons constaté qu'optimiser la largeur de la limite de réflexion latérale aux deux extrémités du résonateur pour atteindre le quart de longueur d'onde (λ/6), ce qui peut améliorer sa pureté spectrale et décaler sa fréquence de résonance. Les résonateurs conçus ont été micro-fabriqués en utilisant des procédés de lithographie sur une plaquette de XNUMX pouces. Les résultats mesurés montrent que le mode parasite peut être converti et dissipé, se divisant en plusieurs modes longitudinaux en optimisant la largeur de la limite de réflexion latérale, ce qui concorde bien avec l'analyse théorique. De même, l'optimisation de la largeur du transducteur interdigital (IDT) et du nombre de doigts IDT peut également supprimer les modes parasites du résonateur. De plus, on constate qu’il n’y a pas de différence significative dans la Qs valeur pour les deux modes du résonateur bimode avec l'ancre étroite et l'ancre complète. L'onde acoustique qui s'échappe de l'ancre vers le substrat produit un petit déplacement et l'énergie est limitée dans le résonateur. Comparé au résonateur avec Au IDT, le résonateur avec Al IDT peut atteindre une valeur plus élevée. Q valeur en raison de sa plus faible perte d’amortissement thermoélastique. Les résultats mesurés montrent que le résonateur à ondes d'agneau bimode optimisé peut obtenir Qs valeur de 2946.3 et 2881.4 à 730.6 MHz et 859.5 MHz, Qp valeurs de 632.5 et 1407.6, coefficient de couplage électromécanique effectif (k2eff) de 0.73 % et 0.11 % respectivement, et présente simultanément une excellente pureté spectrale.
Haiyan SUN
Nantong University,State Key Laboratories of Transducer Technology
Xingyu WANG
Nantong University
Zheng ZHU
Nantong University
Jicong ZHAO
Nantong University,State Key Laboratories of Transducer Technology
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Haiyan SUN, Xingyu WANG, Zheng ZHU, Jicong ZHAO, "Theoretical and Experimental Analysis of the Spurious Modes and Quality Factors for Dual-Mode AlN Lamb-Wave Resonators" in IEICE TRANSACTIONS on Electronics,
vol. E106-C, no. 3, pp. 76-83, March 2023, doi: 10.1587/transele.2022ECP5019.
Abstract: In this paper, the spurious modes and quality-factor (Q) values of the one-port dual-mode AlN lamb-wave resonators at 500-1000 MHz were studied by theoretical analysis and experimental verification. Through finite element analysis, we found that optimizing the width of the lateral reflection boundary at both ends of the resonator to reach the quarter wavelength (λ/4), which can improve its spectral purity and shift its resonant frequency. The designed resonators were micro-fabricated by using lithography processes on a 6-inch wafer. The measured results show that the spurious mode can be converted and dissipated, splitting into several longitudinal modes by optimizing the width of the lateral reflection boundary, which are consistent well with the theoretical analysis. Similarly, optimizing the interdigital transducer (IDT) width and number of IDT fingers can also suppress the resonator's spurious modes. In addition, it is found that there is no significant difference in the Qs value for the two modes of the dual-mode resonator with the narrow anchor and full anchor. The acoustic wave leaked from the anchor into the substrate produces a small displacement, and the energy is limited in the resonator. Compared to the resonator with Au IDTs, the resonator with Al IDTs can achieve a higher Q value due to its lower thermo-elastic damping loss. The measured results show the optimized dual-mode lamb-wave resonator can obtain Qs value of 2946.3 and 2881.4 at 730.6 MHz and 859.5 MHz, Qp values of 632.5 and 1407.6, effective electromechanical coupling coefficient (k2eff) of 0.73% and 0.11% respectively, and has excellent spectral purity simultaneously.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/transele.2022ECP5019/_p
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@ARTICLE{e106-c_3_76,
author={Haiyan SUN, Xingyu WANG, Zheng ZHU, Jicong ZHAO, },
journal={IEICE TRANSACTIONS on Electronics},
title={Theoretical and Experimental Analysis of the Spurious Modes and Quality Factors for Dual-Mode AlN Lamb-Wave Resonators},
year={2023},
volume={E106-C},
number={3},
pages={76-83},
abstract={In this paper, the spurious modes and quality-factor (Q) values of the one-port dual-mode AlN lamb-wave resonators at 500-1000 MHz were studied by theoretical analysis and experimental verification. Through finite element analysis, we found that optimizing the width of the lateral reflection boundary at both ends of the resonator to reach the quarter wavelength (λ/4), which can improve its spectral purity and shift its resonant frequency. The designed resonators were micro-fabricated by using lithography processes on a 6-inch wafer. The measured results show that the spurious mode can be converted and dissipated, splitting into several longitudinal modes by optimizing the width of the lateral reflection boundary, which are consistent well with the theoretical analysis. Similarly, optimizing the interdigital transducer (IDT) width and number of IDT fingers can also suppress the resonator's spurious modes. In addition, it is found that there is no significant difference in the Qs value for the two modes of the dual-mode resonator with the narrow anchor and full anchor. The acoustic wave leaked from the anchor into the substrate produces a small displacement, and the energy is limited in the resonator. Compared to the resonator with Au IDTs, the resonator with Al IDTs can achieve a higher Q value due to its lower thermo-elastic damping loss. The measured results show the optimized dual-mode lamb-wave resonator can obtain Qs value of 2946.3 and 2881.4 at 730.6 MHz and 859.5 MHz, Qp values of 632.5 and 1407.6, effective electromechanical coupling coefficient (k2eff) of 0.73% and 0.11% respectively, and has excellent spectral purity simultaneously.},
keywords={},
doi={10.1587/transele.2022ECP5019},
ISSN={1745-1353},
month={March},}
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TY - JOUR
TI - Theoretical and Experimental Analysis of the Spurious Modes and Quality Factors for Dual-Mode AlN Lamb-Wave Resonators
T2 - IEICE TRANSACTIONS on Electronics
SP - 76
EP - 83
AU - Haiyan SUN
AU - Xingyu WANG
AU - Zheng ZHU
AU - Jicong ZHAO
PY - 2023
DO - 10.1587/transele.2022ECP5019
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E106-C
IS - 3
JA - IEICE TRANSACTIONS on Electronics
Y1 - March 2023
AB - In this paper, the spurious modes and quality-factor (Q) values of the one-port dual-mode AlN lamb-wave resonators at 500-1000 MHz were studied by theoretical analysis and experimental verification. Through finite element analysis, we found that optimizing the width of the lateral reflection boundary at both ends of the resonator to reach the quarter wavelength (λ/4), which can improve its spectral purity and shift its resonant frequency. The designed resonators were micro-fabricated by using lithography processes on a 6-inch wafer. The measured results show that the spurious mode can be converted and dissipated, splitting into several longitudinal modes by optimizing the width of the lateral reflection boundary, which are consistent well with the theoretical analysis. Similarly, optimizing the interdigital transducer (IDT) width and number of IDT fingers can also suppress the resonator's spurious modes. In addition, it is found that there is no significant difference in the Qs value for the two modes of the dual-mode resonator with the narrow anchor and full anchor. The acoustic wave leaked from the anchor into the substrate produces a small displacement, and the energy is limited in the resonator. Compared to the resonator with Au IDTs, the resonator with Al IDTs can achieve a higher Q value due to its lower thermo-elastic damping loss. The measured results show the optimized dual-mode lamb-wave resonator can obtain Qs value of 2946.3 and 2881.4 at 730.6 MHz and 859.5 MHz, Qp values of 632.5 and 1407.6, effective electromechanical coupling coefficient (k2eff) of 0.73% and 0.11% respectively, and has excellent spectral purity simultaneously.
ER -