The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. ex. Some numerals are expressed as "XNUMX".
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The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. Copyrights notice
Récemment, les applications des MEMS (systèmes microélectromécaniques) ont fait des progrès remarquables dans de nombreux domaines. L'application optique des MEMS est l'une des plus prometteuses car elle fournit des dispositifs micro-mécano-optiques, composants clés des systèmes hautes performances dans les réseaux de communication optiques et les dispositifs de stockage de données. Cet article discute des impacts des technologies MEMS sur les systèmes optiques. En outre, des exemples de pointe de micro-commutateurs optiques, de filtres accordables en queue de cochon et de scanners optiques MEMS bidimensionnels sont décrits.
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Hiroyuki FUJITA, Hiroshi TOSHIYOSHI, "Optical MEMS" in IEICE TRANSACTIONS on Electronics,
vol. E83-C, no. 9, pp. 1427-1434, September 2000, doi: .
Abstract: Recently the applications of MEMS (micro electro mechanical systems) have made remarkable progress in many filelds. The optical application of MEMS is one of the most promising because it provides micro mechano optical devices, the key components for high-perfromance systems in optical communication networks and data storage devices. This paper disucces the impacts of MEMS techologies on optical systems. Furthermore, state-of-the-art exmaples of micro optical switches, pig-tailed tunable filters and two-dimensional MEMS optical scanners are described.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e83-c_9_1427/_p
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@ARTICLE{e83-c_9_1427,
author={Hiroyuki FUJITA, Hiroshi TOSHIYOSHI, },
journal={IEICE TRANSACTIONS on Electronics},
title={Optical MEMS},
year={2000},
volume={E83-C},
number={9},
pages={1427-1434},
abstract={Recently the applications of MEMS (micro electro mechanical systems) have made remarkable progress in many filelds. The optical application of MEMS is one of the most promising because it provides micro mechano optical devices, the key components for high-perfromance systems in optical communication networks and data storage devices. This paper disucces the impacts of MEMS techologies on optical systems. Furthermore, state-of-the-art exmaples of micro optical switches, pig-tailed tunable filters and two-dimensional MEMS optical scanners are described.},
keywords={},
doi={},
ISSN={},
month={September},}
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TY - JOUR
TI - Optical MEMS
T2 - IEICE TRANSACTIONS on Electronics
SP - 1427
EP - 1434
AU - Hiroyuki FUJITA
AU - Hiroshi TOSHIYOSHI
PY - 2000
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E83-C
IS - 9
JA - IEICE TRANSACTIONS on Electronics
Y1 - September 2000
AB - Recently the applications of MEMS (micro electro mechanical systems) have made remarkable progress in many filelds. The optical application of MEMS is one of the most promising because it provides micro mechano optical devices, the key components for high-perfromance systems in optical communication networks and data storage devices. This paper disucces the impacts of MEMS techologies on optical systems. Furthermore, state-of-the-art exmaples of micro optical switches, pig-tailed tunable filters and two-dimensional MEMS optical scanners are described.
ER -